Patent Assignment
Reel/Frame 014866/0467
Assignment of Assignor's Interest
Recorded: 2004-01-08
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107, JAPAN
Covered Property
(1)
Method and System for Etching High-K Dielectric Materials