Patent Assignment
Reel/Frame 014872/0529
Assignment of Assignor's Interest
Recorded: 2004-01-05
Pages: 3
Assignors
MANN, HANS-JURGEN
Executed: 2003-10-01
HUDYMA, RUSSELL
Executed: 2003-10-01
EPPLE, ALEXANDER
Executed: 2003-10-01
Assignee
CARL ZEISS SMT AG.
CARL-ZEISS-STRASSE 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Projection Objectives Including a Plurality of Mirrors with Lenses Ahead of Mirror M3
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.