Patent Assignment
Reel/Frame 014876/0884
Assignment of Assignor's Interest
Recorded: 2004-01-12
Pages: 3
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Method for Calibrating an Interferometer Apparatus, for Qualifying an Optical Surface, and for Manufacturing a Substrate Having an Optical Surface
Patent:
7,050,175 →
Application:
10/637,217 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.