Patent Assignment
Reel/Frame 014884/0996
Assignment of Assignor's Interest
Recorded: 2004-01-14
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Method of Using a Sensor Gas to Determine Erosion Level of Consumable System Components