Patent Assignment
Reel/Frame 014888/0198
Confirmatory Assignment
Recorded: 2004-07-21
Pages: 3
Assignor
CARL-ZEISS-STIFTUNG, TRADING AS CARL ZEISS
Executed: 2004-06-30
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE, D-73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Apparatus for Wavefront Detection
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.