Patent Assignment
Reel/Frame 014895/0473
Assignment of Assignor's Interest
Recorded: 2004-01-12
Pages: 9
Assignors
LEE, SANG-HYEOB
Executed: 2003-12-12
LEVY, KARL B.
Executed: 2003-12-19
FELLIS, AARON R.
Executed: 2003-12-19
WONGSENAKHUM, PANYA
Executed: 2003-12-19
GAO, JUWEN
Executed: 2003-12-19
COLLINS, JOSHUA
Executed: 2003-12-19
ASHTIANI, KAIHAN A.
Executed: 2003-12-19
SUNG, JUNGHWAN
Executed: 2004-01-08
CHAN, LANA HIULUI
Executed: 2003-12-19
Assignee
NOVELLUS SYSTEMS, INC.
3970 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Method for Reducing Tungsten Film Roughness and Improving Step Coverage