Patent Assignment
Reel/Frame 014898/0628
Assignment of Assignor's Interest
Recorded: 2004-01-13
Pages: 2
Assignors
IRIYAMA, TAKAHIRO
Executed: 2004-01-05
YAMAGUCHI, YOSHIHIRO
Executed: 2004-01-05
KABATA, TETSUYA
Executed: 2004-01-05
Assignee
KOMATSU INDUSTRIES CORPORATION
3-6, AKASAKA 2-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Apparatus for Monitoring and Storing Lifetime Usage Data of a Plurality of Interchangeable Parts