Patent Assignment
Reel/Frame 014928/0572
Assignment of Assignor's Interest
Recorded: 2004-01-28
Pages: 3
Assignors
KATO, YOSHIHIRO
Executed: 2004-01-14
GOTO, TADASHI
Executed: 2004-01-14
YOSHITAKA, HIKARU
Executed: 2004-01-14
AOKI, MAKOTO
Executed: 2004-01-14
Assignee
TOKYO ELECTRON LTD
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Plasma Process System and Plasma Process Method