Patent Assignment
Reel/Frame 014939/0909
Assignment of Assignor's Interest
Recorded: 2004-01-29
Received: 2004-02-04
Pages: 4
Assignors
SEBALD, MICHAEL
Executed: 2002-06-23
ELIAN, KLAUS
Executed: 2002-06-24
RICHTER, ERNST-CHRISTIAN
Executed: 2002-06-24
HIEN, STEFAN
Executed: 2002-08-27
Assignee
INFINEON TECHNOLOGIES, AG
ST MARTIN STRASSE 53, MUENCHEN, DEX, 81669, GERMANY
Covered Property
(1)
Method for Producing Resist Structures
Application:
10/164,550 →