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App. No. 10/164,550 · Confirmation No. 3632

METHOD FOR PRODUCING RESIST STRUCTURES

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2004-01-29 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-06-07 TRNA Transmittal of New Application 2 View
2002-06-07 SPEC Specification 20 View
2002-06-07 CLM Claims 4 View
2002-06-07 ABST Abstract 1 View
2002-06-07 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
10/164,550
Filed
2002-06-07
Granted
2004-03-09
Pub. No.
US20030008240A1
Art Unit
1756
PTA
-7 days