Patent Assignment
Reel/Frame 014941/0270
Assignment of Assignor's Interest
Recorded: 2003-12-23
Pages: 3
Assignor
TOMOYASU, MASAYUKI
Executed: 2003-12-15
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Observation Window of Plasma Processing Apparatus and Plasma Processing Apparatus Using the Same