Patent Assignment
Reel/Frame 014957/0967
Confirmatory License
Recorded: 2004-02-09
Pages: 2
Assignor
ILLINOIS, UNIVERSITY OF
Executed: 2004-02-02
Assignee
DARPA
3701 NORTH FAIRFAX DRIVE, OFFICE OF THE GENERAL COUNSEL, ARLINGTON, VIRGINIA, 22203
Covered Property
(1)
High cycle deflection beam MEMS devices
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.