Patent Assignment
Reel/Frame 014958/0778
Assignment of Assignor's Interest
Recorded: 2004-02-04
Pages: 2
Assignor
ROUX, STEPHEN
Executed: 2003-12-22
Assignee
ASML HOLDING N.V.
DE RUN 6501, NL-5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
System for Recycling Gases Used in a Lithography Tool