Assignment of Assignor's Interest

Recorded: 2004-01-30 Pages: 2

Assignors

HASHINOKI, KENJI

Executed: 2004-01-08

KOYAMA, YASUFUMI

Executed: 2004-01-08

YAMADA, TAKAHARU

Executed: 2004-01-08

Assignee

DAINIPPON SCREEN MFG. CO., LTD.

1-1 TENJINKITAMACHI TERANOUCHI-AGARU, 4-CHOME HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JAPAN

Covered Property (1)

Method of Transporting and Processing Substrates in Substrate Processing Apparatus

Patent: 7,069,099 →

Application: 10/769,390 →

Publication: US 2004/0182318

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.