Patent Assignment
Reel/Frame 014965/0521
Assignment of Assignor's Interest
Recorded: 2003-09-24
Pages: 3
Assignors
ICHIKI, KATSUNORI
Executed: 2003-09-12
YAMAUCHI, KAZUO
Executed: 2003-09-12
HIYAMA, HIROKUNI
Executed: 2003-09-12
SAMUKAWA, SEIJI
Executed: 2003-09-12
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO 144-8510, JAPAN
Covered Property
(1)
Neutral Particle Beam Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.