Patent Assignment
Reel/Frame 015001/0395
Assignment of Assignor's Interest
Recorded: 2004-02-13
Pages: 3
Assignors
HOFFMAN, DANIEL J.
Executed: 2004-02-12
YANG, JANG GYOO
Executed: 2004-02-12
BUCHBERGER, JR., DOUGLAS A.
Executed: 2004-02-12
BURNS, DOUGLAS
Executed: 2004-02-12
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, PATENT COUNSEL, M/S 2061, SANTA CLARA, CALIFORNIA, 95035
Covered Property
(1)
Plasma Reactor with Overhead Rf Source Power Electrode Having a Resonance That Is Virtually Pressure Independent