Assignment of Assignor's Interest

Recorded: 2004-03-02 Received: 2004-03-05 Pages: 2

Assignors

FURUSAWA, TAKESHI

Executed: 2003-03-05

RYUZAKI, DAISUKE

Executed: 2003-03-05

Assignee

HITACHI, LTD.

6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU, TOKYO, JPX, JAPAN

Covered Property (1)

Semiconductor Manufacturing Method for Low-K Insulating Film

Application: 10/414,010 →