Granted Patent
Utility
US 6,777,325
· Confirmation No. 6240
SEMICONDUCTOR MANUFACTURING METHOD FOR LOW-K INSULATING FILM
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Code | Description | Pages | ||
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| 2004-07-09 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-04-12 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-04-12 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 1 | View | |
| 2004-04-12 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-04-12 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-04-12 | FWCLM |
Index of Claims | 1 | View | |
| 2004-03-08 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-03-08 | FWCLM |
Index of Claims | 1 | View | |
| 2004-02-25 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2004-02-25 | CLM |
Claims | 6 | View | |
| 2004-02-25 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2004-02-25 | FRPR |
Certified Copy of Foreign Priority Application | 42 | View | |
| 2004-02-25 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-11-25 | CTNF |
Non-Final Rejection | 6 | View | |
| 2003-11-25 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2003-11-25 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-11-25 | FWCLM |
Index of Claims | 1 | View | |
| 2003-11-25 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-11-05 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2003-11-04 | SRNT |
Examiner's search strategy and results | 5 | View | |
| 2003-05-22 | A.PE |
Preliminary Amendment | 3 | View | |
| 2003-05-22 | CLM |
Claims | 6 | View | |
| 2003-05-22 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2003-04-16 | TRNA |
Transmittal of New Application | 1 | View | |
| 2003-04-16 | SPEC |
Specification | 30 | View | |
| 2003-04-16 | CLM |
Claims | 8 | View | |
| 2003-04-16 | ABST |
Abstract | 1 | View | |
| 2003-04-16 | DRW |
Drawings-only black and white line drawings | 17 | View | |
| 2003-04-16 | OATH |
Oath or Declaration filed | 4 | View | |
| 2003-04-16 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2003-04-16 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-04-16 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-04-16 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2003-04-16 | FOR |
Foreign Reference | 18 | View |
Inventors
Daisuke Ryuzaki
Kokubunji, JAPAN
Takeshi Furusawa
Hino, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/637
H10W20/096
H10P14/6532
H10P14/6905
H10P14/6922
H10W20/084
H10P14/6548
H10P14/662
H10P14/6686
H10P14/6924
H10P14/6336
H10W20/074
H10W20/093
H10P14/6518
H10W20/062
H10W20/075
H10P14/6342
H10W20/092
H10W20/071
C23C16/0272
C23C16/401
Prosecution
- Examiner
- DANG, PHUC T
- Art Unit
- 2818
- Docket No.
- NIT-373
- Confirmation No.
- 6240
Foreign Priority
2002-115605
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2002-04-18
·
JAPAN
Publication
- Pub. No.
- US20030201465A1
- Pub. Date
- 2003-10-30
Patent Term Adjustment
0days
CHANGE OF ADDRESS
Recorded 2017-11-29
MERGER AND CHANGE OF NAME
Recorded 2010-09-02
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-03-02
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Quick Facts
- Patent No.
- US 6,777,325
- App. No.
- 10/414,010
- Filed
- 2003-04-16
- Granted
- 2004-08-17
- Pub. No.
- US20030201465A1
- Examiner
- DANG, PHUC T
- Art Unit
- 2818
- PTA
- 0 days
External Links