Patent Assignment
Reel/Frame 015043/0852
Assignment of Assignor's Interest
Recorded: 2004-03-03
Pages: 3
Assignors
HAMELIN, THOMAS
Executed: 2003-11-19
WALLACE, JAY
Executed: 2003-11-19
LAFLAMME, ARTHUR JR.
Executed: 2003-11-19
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107, JAPAN
Covered Property
(1)
Processing System and Method for Thermally Treating a Substrate