Patent Assignment
Reel/Frame 015045/0348
Assignment of Assignor's Interest
Recorded: 2004-08-27
Pages: 2
Assignors
DHINDSA, RAJINDER
Executed: 2004-05-20
KOZAKEVICH, FELIX
Executed: 2004-05-24
TRUSSELL, DAVE
Executed: 2004-05-24
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Plasma Processor with Electrode Responsive to Multiple Rf Frequencies