Patent Assignment
Reel/Frame 015052/0047
Assignment of Assignor's Interest
Recorded: 2004-03-05
Pages: 2
Assignee
USHIODENKI KABUSHIKI KAISHA
19TH FLOOR, ASAHITOKAI BUILDING, 6-1,, OHTEMACHI 2-CHOME, CHIYODA-KU, 100, JAPAN
Covered Property
(1)
Extreme Uv Radiation Source and Semiconductor Exposure Device