Patent Assignment
Reel/Frame 015060/0271
Assignment of Assignor's Interest
Recorded: 2004-08-09
Pages: 6
Assignor
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Executed: 2002-09-05
Assignee
CARL ZEISS SMT AG
OBERKOCHEN, GERMANY
Covered Property
(1)
Method and Apparatus for Analysis of Schlieren
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Corrective Coversheet to Add Second Assignee, Previously Recorded on Reel 013503 Frame 0023.
Mar 15, 2004
From: GERHARD, MICHAEL; LENTES, FRANK-THOMAS; KUSCH, CHRISTIAN; SINGER, WOLFGANG
To: SCHOTT GLAS; CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Reel/Frame 015084/0960 →
Assignment of Assignor's Interest
Mar 14, 2005
From: SCHOTT GLAS
To: SCHOTT AG
Reel/Frame 015766/0926 →
Assignment of Assignor's Interest
Sep 20, 2010
From: SCHOTT AG
To: HELLMA MATERIALS GMBH & CO. KG
Reel/Frame 025008/0878 →
A Modifying Conversion
Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →