Patent Assignment
Reel/Frame 015063/0819
Assignment of Assignor's Interest
Recorded: 2004-03-12
Pages: 2
Assignor
NORTON, ADAM E.
Executed: 2004-03-02
Assignee
THERMA-WAVE, INC.
1250 RELIANCE WAY, FREMONT, CALIFORNIA, 94539
Covered Property
(1)
Wafer Metrology Apparatus and Method
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.