Patent Assignment
Reel/Frame 015067/0479
Assignment of Assignor's Interest
Recorded: 2004-03-11
Pages: 5
Assignors
LIN, CHUN HSIEN
Executed: 2003-10-31
LIU, AI-SEN
Executed: 2003-10-31
WU, SUNNY
Executed: 2003-10-31
LIN, YU-LIANG
Executed: 2003-10-31
LO, HENRY
Executed: 2003-10-31
ZHOU, MEI-SHENG
Executed: 2003-10-31
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
NO. 8 LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Advanced Process Control Approach for Cu Interconnect Wiring Sheet Resistance Control