IP Library › Assignment 015072/0292
Patent Assignment
Reel/Frame 015072/0292

Assignment of Assignor's Interest

Recorded: 2004-03-15 Pages: 3
Assignors
SMEDT, RODNEY
Executed: 2003-11-20
SEZGINER, ABDURRAHMAN
Executed: 2003-11-19
HUANG, HSU-TING
Executed: 2003-11-19
Assignee
THERMA-WAVE, INC.
1200 RELIANCE WAY, FREMONT, CALIFORNIA, 94539
Covered Property (1)
Measurement of Overlay Using Diffraction Gratings When Overlay Exceeds the Grating Period
Patent: 7,193,715 →
Application: 10/714,460 →
Publication: US 2004/0137651
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Oct 7, 2005
From: THERMA-WAVE, INC.
To: TOKYO ELECTRON LIMITED
Reel/Frame 016851/0953 →
Assignment of Assignor's Interest Oct 24, 2005
From: THERMA-WAVE, INC.
To: TOKYO ELECTRON LIMITED
Reel/Frame 017136/0621 →