Patent Assignment
Reel/Frame 015094/0101
Assignment of Assignor's Interest
Recorded: 2004-03-15
Pages: 3
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Laser Irradiation Apparatus, Laser Irradiation Method, and Method for Manufacturing a Semiconductor Device