Patent Assignment
Reel/Frame 015119/0886
Assignment of Assignor's Interest
Recorded: 2004-03-19
Pages: 2
Assignors
KIM, JISOO
Executed: 2004-03-15
WORSHAM, BINET
Executed: 2004-03-15
YEN, BI-MING
Executed: 2004-03-15
LOEWENHARDT,PETER
Executed: 2004-03-15
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods for the Optimization of Substrate Etching in a Plasma Processing System