Patent Assignment
Reel/Frame 015125/0629
Assignment of Assignor's Interest
Recorded: 2004-03-23
Pages: 5
Assignors
HUDYMA, RUSSELL
Executed: 2003-02-19
ULRICH, WILHELM
Executed: 2003-11-26
ROSTALSKI, HANS-JURGEN
Executed: 2003-11-26
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Compact 1 1/2-Waist System for Sub 100NM Arf Lithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.