Patent Assignment
Reel/Frame 015129/0251
Assignment of Assignor's Interest
Recorded: 2004-09-15
Pages: 3
Assignor
ONVLEE, JOHANNES
Executed: 2004-08-26
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, NL - 5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Spatial Light Modulator, Method of Spatially Modulating a Radiation Beam, Lithographic Apparatus and Device Manufacturing Method