Patent Assignment
Reel/Frame 015129/0389
Assignment of Assignor's Interest
Recorded: 2004-03-29
Received: 2004-03-29
Pages: 2
Assignor
OWCZARZ, ALEKSANDER
Executed: 2002-10-22
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CA, 94538, UNITED STATES
Covered Property
(1)
Method and Apparatus for Chemical Mechanical Planarization
Application:
10/029,192 →