IP Library › Granted Patent US 6,767,428
Granted Patent Utility
US 6,767,428 · Confirmation No. 5398

METHOD AND APPARATUS FOR CHEMICAL MECHANICAL PLANARIZATION

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2004-06-18 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-03-16 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-03-16 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-03-16 CLM Claims 4 View
2004-03-16 SRFW Search information including classification, databases and other search related notes 1 View
2004-03-16 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-03-05 SRNT Examiner's search strategy and results 1 View
2003-10-20 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-10-20 CLM Claims 4 View
2003-10-20 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-07-16 CTNF Non-Final Rejection 7 View
2003-07-16 892 List of references cited by examiner 1 View
2003-07-11 SRNT Examiner's search strategy and results 1 View
2003-05-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-04-10 CTRS Requirement for Restriction/Election 4 View
2002-04-15 LET. Miscellaneous Incoming Letter 5 View
2002-04-15 DRW Drawings-only black and white line drawings 10 View
2002-04-15 TRNA Transmittal of New Application 4 View
2002-04-15 DRW Drawings-only black and white line drawings 10 View
2002-02-06 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2001-12-20 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-12-20 SRFW Search information including classification, databases and other search related notes 1 View
2001-12-20 FWCLM Index of Claims 1 View
2001-12-20 WFEE Fee Worksheet (SB06) 1 View
2001-12-20 WFEE Fee Worksheet (SB06) 1 View
2001-12-20 WCLM Claims Worksheet (PTO-2022) 1 View
2001-12-20 TRNA Transmittal of New Application 3 View
2001-12-20 SPEC Specification 22 View
2001-12-20 CLM Claims 5 View
2001-12-20 ABST Abstract 1 View
2001-12-20 DRW Drawings-only black and white line drawings 10 View
2001-12-20 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,767,428
App. No.
10/029,192
Filed
2001-12-20
Granted
2004-07-27
Art Unit
1763
PTA
-6 days