Patent Assignment
Reel/Frame 015135/0894
Assignment of Assignor's Interest
Recorded: 2004-09-13
Pages: 2
Assignor
WANG, ALBERT
Executed: 2004-08-23
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Wide temperature range chuck system
Application:
10/840,502 →
Publication:
US 2005/0008983
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.