Patent Assignment
Reel/Frame 015142/0768
Assignment of Assignor's Interest
Recorded: 2004-03-24
Pages: 3
Assignor
MITROVIC, ANDREJ S.
Executed: 2004-01-26
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107, JAPAN
Covered Property
(1)
Method and System for Monitoring Rf Impedance to Determine Conditions of a Wafer on an Electrostatic Chuck