Patent Assignment
Reel/Frame 015153/0513
Assignment of Assignor's Interest
Recorded: 2004-03-29
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Temperature Controlled Hot Edge Ring Assembly for Reducing Plasma Reactor Etch Rate Drift