Patent Assignment
Reel/Frame 015164/0598
Assignment of Assignor's Interest
Recorded: 2004-03-30
Pages: 5
Assignors
FENG, HSIEN-PING
Executed: 2004-03-10
TSAO, JUNG-CHIH
Executed: 2004-03-10
CHENG, HSI-KUEI
Executed: 2004-03-10
LEE, CHIH-TSUNG
Executed: 2004-03-10
CHENG, MING-YUAN
Executed: 2004-03-10
LIN, STEVEN
Executed: 2004-03-10
CHUANG, RAY
Executed: 2004-03-10
LIU, CHI-WEN
Executed: 2004-03-10
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INSDUSTRIAL PARK, HSIN-CHU 300-77, R.O.C., TAIWAN
Covered Property
(1)
Post Ecp Multi-Step Anneal/H2 Treatment to Reduce Film Impurity