Patent Assignment
Reel/Frame 015168/0910
Assignment of Assignor's Interest
Recorded: 2004-04-01
Pages: 3
Assignor
CHANG, CHRIS
Executed: 2004-01-09
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Yttria-Coated Ceramic Components of Semiconductor Material Processing Apparatuses and Methods of Manufacturing the Components