Patent Assignment
Reel/Frame 015174/0040
Assignment of Assignor's Interest
Recorded: 2004-03-30
Pages: 3
Assignors
KONISHI, NOBUO
Executed: 2004-03-26
TOSHIMA, TAKAYUKI
Executed: 2004-03-26
ORII, TAKEHIKO
Executed: 2004-03-26
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Substrate Processing Method and Apparatus