Patent Assignment
Reel/Frame 015174/0817
Assignment of Assignor's Interest
Recorded: 2004-03-31
Pages: 3
Assignor
CHEN, YI-LING
Executed: 2004-03-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO. LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE BASED INDUSTRIAL PARK, HSIN-CHU, 300-77 R.O.C., TAIWAN
Covered Property
(1)
Method for in Situ Monitoring of Chamber Peeling