Patent Assignment
Reel/Frame 015175/0068
Assignment of Assignor's Interest
Recorded: 2004-04-05
Pages: 4
Assignors
GOTO, MASASHI
Executed: 2003-08-08
NAKATA, YUKIHIKO
Executed: 2003-08-08
AZUMA, KAZUFUMI
Executed: 2003-08-08
OKAMOTO, TETSUYA
Executed: 2003-08-08
Assignee
KABUSHIKI KAISHA EKISHO SENTAN GIJUTSU KAIHATSU CENTER
292 YOSHIDA-CHO TOTSUKA-KU, YOKOHAMA-SHI, KANAGAWA-KEN, JAPAN
Covered Property
(1)
Plasma Processing Apparatus