Patent Assignment
Reel/Frame 015179/0668
Assignment of Assignor's Interest
Recorded: 2004-04-01
Pages: 2
Assignors
MIYAJI, SHINYA
Executed: 2004-03-16
CHEN, XINWEI
Executed: 2004-03-16
SAITO, SHINJI
Executed: 2004-03-16
Assignee
NHK SPRING CO., LTD.
10, FUKUURA 3-CHOME, KANAZAWA-KU, YOKOHAMA-SHI, KANAGAWA 236-0004, JAPAN
Covered Property
(1)
Electrostatic Chuck and Production Method Therefor