Patent Assignment
Reel/Frame 015179/0762
Assignment of Assignor's Interest
Recorded: 2004-03-31
Pages: 3
Assignors
JOE, RAYMOND
Executed: 2004-03-29
GUMPHER, JOHN
Executed: 2004-03-31
DIP, ANTHONY
Executed: 2004-03-29
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107, JAPAN
Covered Property
(1)
Method for Extending Time Between Chamber Cleaning Processes