Patent Assignment
Reel/Frame 015180/0075
Assignment of Assignor's Interest
Recorded: 2004-03-31
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method of and Platen for Controlling Removal Rate Characteristics in Chemical Mechanical Planarization
Patent:
6,955,588 →
Application:
10/816,431 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.