Patent Assignment
Reel/Frame 015200/0315
Re-Record to Correct the Assignee's Address Previously Recorde at Reel/Frame 01444/0599
Recorded: 2004-04-12
Pages: 2
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
1-1 TENJINKITAMACHI, TERANOUCHI-AGARU, 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method Drying Substrate
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.