Patent Assignment
Reel/Frame 015200/0875
Assignment of Assignor's Interest
Recorded: 2004-04-12
Pages: 15
Assignors
HASHIMOTO, SHINICHI
Executed: 2003-02-19
YODA, HARUO
Executed: 2004-02-19
MURAKI, MASATO
Executed: 2004-03-23
Assignees
ADVANTEST CORPORATION
1-32, ASHAHI-CHO 1-CHOME, NERIMA-KU, TOKYO, JAPAN
CANON KABUSHIKI KAISHA
30-2, 3-CHOME, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
HITACHI, LTD.
6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Electron Beam Exposure Apparatus, Electron Beam Exposure Apparatus Calibration Method, and Semiconductor Element Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.