Patent Assignment
Reel/Frame 015221/0395
Assignment of Assignor's Interest
Recorded: 2004-04-15
Pages: 3
Assignors
TOMOYASU, MASAYUKI
Executed: 2004-01-20
FUNK, MERRITT LANE
Executed: 2003-12-24
PINTO, KEVIN AUGUSTINE
Executed: 2004-01-12
ODAGIRI, MASAYA
Executed: 2004-01-27
CHEN, LEMUEL
Executed: 2004-02-09
YAMASHIA, ASAO
Executed: 2004-01-21
IWAMI, AKIRA
Executed: 2004-02-02
TAKAHASHI, HIROYUKI
Executed: 2004-01-23
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107, JAPAN
Covered Property
(1)
Method and System for Performing a Chemical Oxide Removal Process