Patent Assignment
Reel/Frame 015224/0299
Assignment of Assignor's Interest
Recorded: 2004-04-15
Pages: 2
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO, JAPAN
Covered Property
(1)
Thin-Film Deposition Apparatus