Patent Assignment
Reel/Frame 015248/0504
Assignment of Assignor's Interest
Recorded: 2004-04-22
Pages: 2
Assignor
WEGMANN, ULRICH
Executed: 2003-08-05
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and System for Measuring the Imaging Quality of an Optical Imaging System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.