Patent Assignment
Reel/Frame 015258/0135
Assignment of Assignor's Interest
Recorded: 2004-04-20
Pages: 3
Assignors
CHON, SOO YOUNG
Executed: 2004-04-16
WON, TAE KYUNG
Executed: 2004-04-16
FURUTA, GAKU
Executed: 2004-04-16
WANG, QUNHUA
Executed: 2004-04-16
WHITE, JOHN M.
Executed: 2004-04-19
PARK, BEOM SOO
Executed: 2004-04-16
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Controlling the Properties and Uniformity of a Silicon Nitride Film by Controlling the Film Forming Precursors