Patent Assignment
Reel/Frame 015265/0504
Assignment of Assignor's Interest
Recorded: 2004-04-26
Pages: 3
Assignors
TOTZECK, MICHAEL
Executed: 2004-02-16
ENKISCH, BIRGIT
Executed: 2004-02-18
SCHUSTER, KARL-HEINZ
Executed: 2004-02-16
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Optically Polarizing Retardation Arrangement, and Microlithography Projection Exposure Machine
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.