Patent Assignment
Reel/Frame 015276/0011
Assignment of Assignor's Interest
Recorded: 2004-04-29
Pages: 6
Assignors
PASQUALONI, ANTHONY MARK
Executed: 2004-01-23
MAHULIKAR, DEEPAK
Executed: 2003-12-02
LAFOLLETTE, LARRY A.
Executed: 2004-04-16
JENKINS, RICHARD J.
Executed: 2004-01-27
Assignee
ARCH SPECIALTY CHEMICALS INC.
501 MERRITT 7, P.O. BOX 4500, NORWALK, CONNECTICUT, 06856
Covered Property
(1)
Chemical mechanical polishing slurry composition for polishing conductive and non-conductive layers on semiconductor wafers
Application:
10/724,786 →
Publication:
US 2004/0159050